Mass flow sensor CMS

gasthermal mass flowMEMS

The CMS is a highly reliable and versatile series of gas mass flow meters that uses a µF (Micro Flow) sensor as its sensing element. The µF sensor is a MEMS thermal mass flow sensor capable of measuring ultra low flow rates. The integration of the µF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost. Features of the CMS Gas Mass Flow Sensor include: • Micro flow sensor offers high accuracy of ±3% RD (standard model) • High resolution of 0.1 L/min Functions include: • flow rate/integrated flow rate indication • analog ouptut, • event output • analog output scaling • Micro flow sensor eliminates need for straight run piping upstream of meter • Up to five CMS units can be connected to a single dedicated CMW100A multi-channel indicator Other Applications: • air • nitrogen • oxygen • argon • hydrogen • helium • carbon dioxide • propane • butane and more…